COMPONENTS
  • Sputtering Components Inc.
  • - envis-IONTM DMPTS
  • - envis-IONTM DMCVD
  • Gencoa
  • - Linear Ion Source
  • - IMC Circular Ion Source
  • - Pulsed Valve Cracker Effusion Cell
  • Platar
  • - Gridded Ion Source
  • UHV Components
Ion Source & PECVD Source

Platar

Gridded Ion Source


STANDARD GRIDDED SOURCES [KLAN series]

특징 PLATAR produces the inexpensive standard ion-beam equipment including round ion sources of KLAN series with maximum outlet beam diameters of 2, 5, 10 and 16 cm and also power supplies of SEF-series for these sources. The equipment is especially designed for research and education applications but can be used for production also. It is very reliable and simple in operation.

This provides excellent conveniences for users at the equipment’s application in processes connected with frequent source parts’ cleanings (oxide film deposition, etc.)

KLAN-series 2cm & 5cm ion source

Parameter Model
KLAN-23M KLAN-52M KLAN-53M KLAN-54M
Ion source type Cold hollow cathode filament Cold hollow cathode Radiofrequency
13.56MHz
Working gases Inert, N2, O2 mixtures Ar and other inert Inert, N2, O2 mixtures Inert, O2, N2, and
other active
Outlet beam diameter Up to 2cm Up to 5cm
Ion energy 100 – 1500 eV
Ion current Up to 20mA Up to 80-100mA
Gas flow rate 2-4sccm 3-6sccm 4-6sccm 8-12sccm
Cooling yes no yes yes
Ion optics Two-grid, three-grid, flat, focused, defocused,
material – molybdenum, titanium
Cathode-neutralizator Filament immersed (external) plasma bridge (optional)
External diameter 62mm 100mm

KLAN-series 10cm & 16cm ion source

Parameter Model
KLAN-103M KLAN-104M KLAN-105M KLAN-163M
Ion source type filament Cold hollow cathode Radiofrequency
13.56MHz
Radiofrequency
13.56MHz
Working gases Ar and other inert Inert, N2, O2 mixtures Inert, O2, N2, and
other active
Inert, O2, N2, and
other active
Outlet beam diameter Up to 10cm Up to 16cm
Ion energy 100 – 1500 eV
Ion current Up to 250-300mA Up to 300 (600)mA
Gas flow rate 4-8sccm 5-8sccm 10-15sccm 15-20sccm
Cooling no yes yes yes
Ion optics Two-grid, three-grid, flat, focused, defocused,
material – molybdenum, titanium
Cathode-neutralizator Filament immersed (external) plasma bridge (optional)
External diameter 150mm 232mm

Platar

Gridded Ion Source


POWER SUPPLIES [SEF series]

Power supplies of SEF-series

Parameter Model
SEF-23M
for KLAN-23M
SEF-52M
for KLAN-52M
SEF-53M
for KLAN-53M
SEF-54M
for KLAN-54M
SEF-103M
for KLAN-103M
SEF-104M
for KLAN-104M
SEF-105M
for KLAN-105M
SEF-163M
for KLAN-163M
Discharge 70V, 2A 60V, 3A 70V, 2A 60V, 5A 70V, 3A
Cathode 600V, 1A 12V, 20A 600V, 1A 12V, 20A 600V, 2A
RF power 13.56MHz,
250W
13.56MHz,
600W
13.56MHz,
1000W
Ion beam 1500V, 30mA 1500V, 100mA 1500V, 300mA 1500V,
300(600)mA
Accelerator 1000V, 30mA 1000V, 50mA 1000V, 100mA 1000V, 200mA
Neutralizer
heating
12V, 20A
Neutralizer
coupling
25V, 30mA 25V, 100mA 25V, 300mA 250V,
300(600)mA
Control Manual, remote (optional)
Input power 220-240V, 50/60Hz