THIN FILM

TECHNOLOGY
  • Platinized wafer
  • Chemical solution
  • Metal coating service
  • Piezoelectric measurement system
Piezoelectric measurement system

TF Analyzer Basic Unit

TF Analyzer FE Module

Model TFA 1000E TFA 2000E TFA 3000E
Spec. Voltage range ±12 V Voltage range ±25 V Voltage range ±25V
(optional with external amplifier up to 10.000 V)
Maximum hysteresis
frequency 1kHz
Maximum hysteresis
frequency 5kHz
Maximum hysteresis
frequency 250kHz
(optional high speed
integrator Max. 1MHz)
Maximum hysteresis
frequency 5kHz
Max. fatigue
frequency 300kHz
Max. fatigue
frequency 20MHz

Configuration

aixACCT system
Units Base Unit aixPES aix4PB aixCMA aixDBL
More More More More More
- Hysteresis measurement
- PUND measurement
- Fatigue measurement
- Retention measurement
- Static hysteresis
  measurement
- Imprint measurement
- Leakage current
  measurement
- optional C-V
  measurement
- Hysteresis of Polarization
  and Displacement
- Fatigue
- Leakage current
- C-V and piezo
  coefficient
- Temperature dependent
  measurements
- Impedance
- User defined waveform
- Electrical properties and
  electromechanical prop
  erties e31,f and h31
- Hysteresis of Polarization
  and Displacement (under
  different load conditions)
- Blocking force
- Fatigue
- Leakage current
- Impedance
- User defined waveforms
  (voltage and force)
- Measurement of current
  and displacement
  response using Double
  laser beam on wafer level
- Unique resolution down
  to 1pm
TFanalyzer - - - - -
FEmodule - - - - -
High voltage
Amplifier
200 V ~ 10 kV - - - -
Laser
Interferometer
Resolution : 1.2 nm - - - -
Temp.controller ~ 650 ℃ - - -
Force controller Force profiling
Resolution : 1 μN
-
Sample
holder
TFSHU for Thin film - -
aix4PB for Thin/Thick film [e31] - - -
PSHU for Bulk [d33] - -
CMA for Multilayer Actuator
[d33, d31, blocking force]
-
MLA for Multilayer Actuator[d33] -
MLA for Thin/Thick film[d33]
using double laser
- -