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Magnetron Cathode
Rotary Cathode
Rectangular Cathode
Circular Cathode
Ion Source
LEA
CEA
Process Controller
Reactive Gas Controller
RGA(Optix)
Target Materials
Target Materials
Retrofit
Retrofit
Thin Film Technology
Aixacct
Minitus
COMPANY
CONTACT
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Ion Source
Ion Source
KCMC and GENCOA linear ion sources are using in lengths of 300mm up to 4000mm
And Circular ion source for 230pi and 170pi including neutralizer
LEA
CEA