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Magnetron Cathode
Rotary Cathode
Rectangular Cathode
Circular Cathode
Ion Source
LEA
CEA
Process Controller
Reactive Gas Controller
RGA(Optix)
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Target Materials
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Retrofit
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Magnetron Cathode
Magnetron Cathode
Rotary Cathode
Up to 4M size cathode, Drop-in & Side mount type, DC & RF power,
All Rotary Cathode can be included Swivel mode.
Rotary Cathode
Rectangular Cathode
Circular Cathode
Rotary Cathode
Rotary Cathode
Rotary Cathode_Magnet Bar
Rotary Cathode_Magnet Bar
Rotary Cathode_Magnet bar
Rotary Cathode
Rotary Cathode_Anode bar
Rotary Cathode
Roll to Roll Sputtering System
Rotary Cathode
LID module
Rotary Cathode